The global outbreak of COVID-19 has sparked the interest in applying ultraviolet (UV) light for disinfection and sterilization. The academic circles has further explored its mechanism, functions and applications and the industry meanwhile has continuously rolled out new products to respond to the urgent need of fighting this epidemic. The stringent restrictions on using mercury in relevant international conventions further highlight the advantages of deep ultraviolet (DUV)/(UVC) LEDs for energy conservation and environmental protection. DUV LEDs has many advantages, such as continuous and accurate wavelength adjustment, low voltage safety, easy to integrate and so on. It has a broad applicable prospects in sterilization and disinfection, air and water purification, polymer curing, medical treatment, biochemical detection, gas sensing and other fields. It is therefore an ideal option to replace the traditional UV light source such as mercury lamp. However, the luminous power, electro-optic conversion efficiency and lifetime of DUV LEDs are not so desirable and these challenges remains to be addressed. The roles of traditional UV luminaries and DUV LEDs in sterilization and disinfection, the products’ suitability for different scenarios, the efficacy and cost-effectiveness, irradiation dose and time parameters, limitations and etc. have been the concerns of these who inside and outside the industry Per the requirements of ISA members, we have compiled The Key Technology of DUV LEDs and Its Application in the Field of Sterilization and Disinfection which introduces the key technologies in the manufacturing chain of DUV LEDs including MOCVD device technology, epitaxy technology, packaging technology, application areas as well as respond to aforementioned concerns. This report aims to provide a “longitudinal profile” map of DUV LED from manufacture to application for these who are interested in this subject, to help people understand DUV LEDs more comprehensively, and to promote the safe, effective and wide applications of DUV LEDs in the world.